SC-SU-I型磁控溅射仪 |
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https://www.catraldoylecreative.com/2o36s2oheyd 参数 |
指标 |
| 石英仓尺寸 | https://www.moisttech.com/k3hdrjdr |
| 样品台尺寸 | 70mm |
| 溅射面积 | 50mm |
| 最高真空度 | 5pa |
| 可通气体 | 氩气，氮气等惰性气体 |
| 最高溅射速度 | 8nm/min |
| 整机功率 | 200W |
| 机器尺寸 | 360(W)X310(D)X150mm(H) |
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